Wet Station Parts Product List
Wet Station Parts
Altay Inc. provides high quality Wet Station Parts for sale. Check out our Wet Station Parts Product List and feel free to contact us.
| Item Nr. | Description | Qty | 1st Picture | 2nd Picture |
|---|---|---|---|---|
| 1 | QDR bath WPMS01 200mm Sugai SES | 1 |  | |
| 2 | FR Bath WPOD01 200mm Sugai SES | 1 |  |  |
| 3 | FR Bath WPMS01 200mm Sugai SES | 1 |  |  |
| 4 | Wafer guide set left&right WVES01 200mm Sugai SES | 1 |  | |
| 5 | Bath cover one set WVES01 200mm Sugai SES 4 ea in box #49 | 14 |  | |
| 6 | Baffle plate WVES01 200mm Sugai SES | 2 |  | |
| 7 | H2SO4 Bath &bath covers& plumbing hardware Kaijo WPCK02 | 2 |  | |
| 8 | HQDR bath Kaijo WPCK02 | 1 |  | |
| 9 | Wafer guides for H2O2 WVES01 200mm Sugai SES | 3 |  | |
| 10 | PEEK RT Chucks Kaijo WOEK01 | 2 |  | |
| 11 | Wafer guides PEEK Kaijo WOEK01 | 4 |  | |
| 12 | Quart Chuck for SES wet bench WPMS01 200mm Sugai SES | 6 |  | |
| 13 | Quartz deflector baffle plate WPMS01 200mm Sugai SES | 1 |  | |
| 14 | Wafer guide Quartz WPMS01 200mm Sugai SES | 1 |  | |
| 15 | Quartz bubbler One good one repairable WPMS01 200mm Sugai SES | 6 |  | |
| 15-b | Quartz HS bubbler |  | ||
| 16 | HS bath WPMS01 200mm Sugai SES | 1 |  |  |
| 17 | HQDR bath WPMS01 200mm Sugai SES | 1 |  |  |
| 18 | NW valve &HTS valve filter housing 200mm Sugai SES | 1 |  |  |
| 19 | SC1 bath KAIJO WPOD01 200mm | 1 |  |  |
| 20 | QDR bath WPMS01 200mm Sugai SES | 1 |  |  |
| 21 | QDR deflector punch plate WPMS01 200mm Sugai SES | 1 |  | |
| 22 | HS1 right quartz cover WPMS01 200mm Sugai SES | 1 |  | |
| 23 | Quartz wafer guide WPMS01 200mm Sugai SES | 4 |  | |
| 24 | Quartz wafer chucks WPMS01 200mm Sugai SES | 12 |  | |
| 25 | 1. cover 2. HQDR shower bar 3. bath cover 4. arm cover WPMS01 200mm Sugai SES |  |  |
|
| 26 | H2SO4 Bath cover 2 ea set WPCK02 | 2 |  | |
| 27 | Quartz chuck mounting cracked Kaijo WPCK02 200mm | 6 |  |  |
| 28 | QDR BATH w/valve WTWS02 200mm | 1 |  |  |
| 29 | QDR BATH w/valve WTWS02 200mm | 1 |  | |
| 30 | HSI bath WPRS04 200mm | 1 |  | |
| 31 | Quartz SC1 wafer guide WPRS04 200mm | 4 |  | |
| 31-b | Quartz HS wafer guide | 6 |  | |
| 32 | QDR bath WPDS09 | 1 |  |  |
| 33 | PEEK wafer guide WPDS09 | 2 |  | |
| 34 | 1)Quartz SC1 bath 2) bathe covers 2 3) temp tube 4 WPDS09 | 1 |  |  |
| 35 | Quartz chucks WOEK01 | 4 |  | |
| 36 | WOEK01 | 1 |  | |
| 37 | H2SO4 bath WPRS02 | 1 |  | |
| 38 | H2SO4 bath WPRS02 | 1 |  | |
| 39 | Quartz QDR bath WPDS01 | 1 |  | |
| 40 | Quartz SC1 bath WPRS02 | 1 |  | |
| 41 | Quartz SC1 bath Needs repair WPRS02 | 1 |  | |
| 42 | Quartz QDR bath WTWS02 | 1 |  | |
| 43 | Quartz FR QDR bath WPRS04 | 1 |  | |
| 44 | Quartz BUFFER 1 bath WPRS04 | 1 |  | |
| 45 | Quartz FR QDR bath WPDS09 | 1 |  | |
| 46 | Quartz SC1-2 bath SC1-2 buffer plate WPRS02 | 1- 1 |  |  |
| 47 | Quartz SC1-2 wafer guide Used with above tank WPRS02 | 1 |  | |
| 48 | Quartz HQDR bath & spray manifolds WPRS02 | 1 |  | |
| 49 | Covers for SC1 bath WPRS02 |  | ||
| 50 | Quartz TC tube WPRS02 | 4 |  | |
| 51 | Quartz TC tube One for WPRS02 Two for WPRS04 | 3 |  | |
| 52 | Quartz Final rinse bath WTWS02 | 1 |  | |
| 53 | Quartz SC1 bath WTWS02 | 1 |  | |
| 54 | Quartz HS2 bath WPRS04 | 1 |  | |
| 55 | Quartz SC1 bath Needs repair WPRS04 | 1 |  | |
| 56 | Quartz HQDR rinse bath WPRS04 |  | ||
| 57 | Quartz HQDR rinse bath WPRS04 | 1 |  | |
| Quartz TC tube | 1 |  | ||
| 58 | Quartz SC1 bath Needs repair side wall crack WTWS02 | 1 |  | |
| 59 | Quartz HQDR rinse bath WOEK01 | 1 |  | |
| 60 | NEW Quartz final rinse bath 70400169900 400-005-00 WOEK01 | 1 |  |  |
| 61 | Quartz SC1 bath WOES02 | 1 |  | |
| 62 | PEEK wafer guide WOEK01 | 2 |  | |
| 63 | Quartz wafer guide WOEK01 | 1 |  | |
| 64 | Quartz HQDR rinse bath WPRS02 | 1 |  | |
| 65 | Quartz HQDR rinse bath WPRS02 | 1 |  | |
| 66 | Quartz QDR rinse bath WPDS09 | 1 |  | |
| 67 | Robot guide | 7 |  | |
| 68 | Immersible quartz heater One needs repair | 4 |  | |
| 69 | Ultrasonic Quartz chuck cleaning bath | 2 |  |  |
| 70 | Quartz bubbler | 4 |  | |
| 71 | Robot guides | 2 |  |  |
| 72 | 2” PFA pneumatic quick dump valve & hardware | 1 |  |  |
| 73 | Quartz HQDR bath WPRS04 | 1 |  | |
| 74 | Quartz HQDR bath WOEK01 | 1 |  | |
| 75 76 77 | CAMFIL HEPA filters WPDK03 | 2 3 3 | |  |
| 75 | CAMFIL HEPA initial filter WPDK03 | 4 |  | |
| 78 | Acid monitoring sensor case tubes WPDK03 | 2 |  | |
| 78 | Acid bath covers Set of 2 WPDK03 | 2 |  | |
| 78 | Bath front covers One set for full wet station WPDK03 | SET |  | |
| 78 | HS Acid monitoring sensor case tubes WPMS01 | 1 |  | |
| 78 | Shower manifolds For HQDR bath WPMS01 | 2 |  | |
| 79 | IWAKI auto dampner Model: PDA- 208 HF | 3 |  |  |
| 80 | KOMATSU heater E-332B-6-UL with controller GR Pn.411-11- 1N30 | 3 |  |  |
| 81 | MITSUBISHI inverter Model: FR- U120-NO.75K- UF | 1 |  |  |
| 82 | This part moved to # 69 | |||
| 83 | HORIBA SC-1 monitor Model: CS-220 | 1 |  |  |
| 84 | Faxboro conductivity and resitivity Model: 875CR-C1F-A | 1 |  |  |
| 85 | Ehaust digital Monitors Krone KS-2500 | 4 |  | |
| 86 | RP-200A LINTEC meter | 1 |  | |
| 87 | 423C-19-9-DN | 1 |  |  |
| 88 | NAIS HOUR METER TH-141U | 1 |  | |
| 89 | Ehaust digital Monitors Krone KS-2500 | 6 |  |  |
| 90 | KAIJO APC-1 | 4 |  | |
| 91 | Yamatake – Honeywell IP300 | 9 |  | |
| 92 | Proface29 GP2300-TC41- 24V Model: 80070-02 | 1 |  |  |
| 93 | Temp controller Tokyo Keiso IR-6000-11-C | 2 |  | |
| 94 | PS211 OC224 ID218 OD213 ID219 OD412 ID212 OMRON SYSMAC PLC | 1 1 1 2 3 1 1 |  | |
| 95 | PC211 CV2000-V1 SLK21 LK201 ID219 OD213 OD412 ID212 IC201 OMRON SYSMAC PLC | 1 1 1 1 4 2 1 1 1 |  | |
| 96 | PA208 ID219 OD213 II201 CV500-B1042 DRIVE OMRON SYSMAC PLC | 1 2 2 1 |  | |
| 97 | PA208 ID219 OD213 II201 CV500-B1062 DRIVE OMRON SYSMAC PLC | 1 3 2 1 |  | |
| 98 | PA208 ID291 OD213 II201 CV500-B1042 DRIVE OMRON SYSMAC PLC | 1 3 3 1 |  | |
| 99 | PA208 ID219 OD213 ID212 OD415 II201 CV500-B1062 DRIVE OMRON SYSMAC PLC | 1 2 2 1 1 1 |  | |
| 100 | Kaijo stocker flat aligner lift | 4 |  | |
| 101 | Kaijo stocker cassette rotater | 6 |  | |
| 102 | Kaijo stocker cassette changer | 6 |  | |
| 103 | Kaijo HS in-line heater Junction box | 4 2 |  |  |
| 104 | Kaijo start/stop console | 4 |  | |
| 105 | Kaijo 4 solenoids 5 solenoids 6 solenoids 7 solenoids 12 solenoids 16 solenoids FM SOLID MANIFOLD X80M-ED-DN | 1 2 1 2 2 3 |  |  |
| 106 | AC servo driver Kokusai driver Power supply Omron Toki nose filter Kaijo Carrier stocker | 3 3 10 5 |  |  |
| 107 | MSP301N Speed controller Orental motor Kaijo stocker | 2 |  | |
| 108 | G2R-2-SND 24V DC MY4N-D2 24V DC OMRON Relay block | 52 5 |  | |
| 109 | E3S-AT11-L E3S-AT11-D OMRON sensor Kaijo stocker | 6 6 |  |  |
| 110 | E3S-CL1 Sensor Kaijo stocker | 8 |  |  |
| 111 | E3S-BD61 Photoelectric sensor OMRON Kaijo stocker | 12 |  |  |
| 112 | UM-R5T SEEKA Kaijo stocker | 4 |  | |
| 113 | UM-Z3SV SEEKA Kaijo stocker | 8 |  |  |
| 114 | MBS-1205-22 Noise filter Nemic- Lambda Kaijo stocker | 3 |  | |
| 115 | UM-TR50TV UM-TL50T SEEKA Kaijo stocker | 14 12 |  | |
| 116 | 3GN30K 3GN10XK 3RK15GN-AUL Oriental reversible motor 100~115V | 2 |  |  |
| 117 | MSMA041A1F AC servo motor Panasonic | 2 |  |  |
| 118 | AC servo motor w/ gear housing Panasonic | 2 |  |  |
| 119 | 4047N123E12 U/D AC servo motor w/ gear Tamagawa | 2 |  |  |
| 120 | 3275N500E12 U/D AC servo motor w/ gear Tamagawa | 2 |  |  |
| 121 | MBM315-411 Magnetic brake AC motor Oriental motor One has no motor | 3 |  | |
| 122 | 2-HIG- LLRA720 Quick connects TUTHILL | 48 |  |  |
| 123 | CMK2-CC-32- 75 CKD cylinder | 4 |  |  |
| 124 | Stocker elevator motor & housing | 3 |  |  |
| 125 | Communicatio n adapter |  | ||
| 126 | AQ-10 AR1-211 Resistivity meter and probe | 2 2 |  |  |
| 127 | E2K-X4ME1 Cpacitive proximity switch OMRON | 4 |  | |
| 128 | TBL DRIVER AC servo motor controller Tamagawa | 3 |  | |
| 129 | Proface Loader unit side and Unloader unit side GP270-LG11- 24V | 1 1 |  |  |
| 130 | NT31-ST123- EV3 Loader unit Unloader unit Drive/RT C/C bath Omron | 1 1 1 1 |  |  |
| 131 | EST0220C05W NX00 H02 S01 Smart terminal Yamatake- Honeywell | 1 |  |  |
| 132 | VF3450-5EZ DC21-26V 4 Solenoids 2 Solenoids SMC | 3 2 |  |  |
| 133 | BCR2612-RDB D model BCR2600 barcode reader BCV5052 Power supply Model BCV5050 | 1 1 |  |  |
| 134 | SCD30 C305GD00410 0 Temperature controller Yamatake- Honeywell | 4 |  |  |
| 135 | MS61L Differential pressure switch Yamamto electric | 5 |  | |
| 136 | PPD-P10PKN- 6P CKD pressure switch |  |  |
|
| 137 | EQ-23 Sensor SUNX | 4 |  |  |
| 138 | D4D-2121N | 6 |  | |
| 139 | LSP-2-0 LEAK SENSOR | 5 | ||
| 140 | PS-X28 PS-201T sensor Keyence | 8 12 |  |  |
| 141 | H3Y-2 Timer Omron | 3 |  | |
| 142 | 1A FEC FUSE | 8 |  | |
| 143 | ST-18CM4 Buzzer speaker Arrow | 1 |  | |
| 144 | BM-202 24V AC/DC Signal phone PATLITE | 1 |  | |
| 145 | EE-SX670 | 4 |  | |
| 146 | EE-SPX303 Omron | 9 |  | |
| 147 | RS-1 Magnetic switch | 10 |  | |
| 149 | US315-01T Speed m control unit Oriental motor | 1 |  | |
| 150 | PS-25 amplifier PS-205 Sensor Keyence | 2 2 |  |  |
| 151 | MLPS-10A60 w/one valve MLPS-10A60 w/two valves MLPS-10A60 w/4 valves MLPS-10A60 w/5 valves | 1 2 1 1 |  | |
| 152 | FUSE 1A 100V | 56 |  | |
| 153 | Switch panel front Kaijo | 9 |  | |
| 154 | S82S-0312 | 1 |  | |
| 155 | CHP-NF-10s- DC24 CHIP-F timer | 9 |  |  |
| 156 | MY2N 24VAC MY4N m 200VAC OMRON Relay | 9 1 |  | |
| 157 | MY2N-D2 MY4N-D2 24V DC 4V DC m OMRON Relay | 39 3 | ||
| 158 | CP30-BA, 1A CP30-BA, 2A CP30-BA, 3A CP30-BA, 5A CP30-BA, 10A CP30-BA, 20A AC/DC 2ph CP30-BA, 3A CP30-BA, 5A CP30-BA, 7A CP30-BA, 10A AC 3phase 5A | 9 32 7 9 16 2 3 5 2 1 |  |  |
| 159 | DCN1-3 T-PORT TAP OMRON | 1 |  | |
| 160 | SS40-TL1O Set is 2 mWIDE SENSOR TAKEX | 2 |  |  |
| 161 | CIMR- G5V25P5 VARISPEED 616G5 | 1 |  |  |
| 162 | X88M-DN-ED- 149W mX80M-ED-DN m8x2=16 valves | 1 4 |  |  |
| 163 | CR6L-50 FUJI super rapid fuse | 6 |  | |
| 164 | SC-N1 3ph contactor mFUJI | 2 |  | |
| 165 | SRD parts | 1 |  | |
| 166 | SRD parts | 1 |  | |
| 167 | SRD parts | 1 |  | |
| 168 | SRD parts | 1 |  | |
| 169 | HA-4A Simco | 1 |  |  |
| 170 | Valve x4 | 1 |  | |
| 171 | SRD balancers | 2 |  | |
| 172 | E5C2 Temp controller omron | 2 |  | |
| 173 | Terminal blocks | 4 |  | |
| 174 | Pressure gauge | 1 |  | |
| 175 | AV-7679- 631U3 Air valve | 6 |  | |
| 176 | G6B478ND Omron | 1 |  | |
| 177 | SZR-LY2-N1 Relay Honeywell | 2 |  | |
| 178 | HHF measurement tank Kaijo | 1 |  | |
| 179 | NH4OH measurement tank Kaijo | 1 |  | |
| 180 | EX-C60FF- 100S Meetering pump IWAKI | 5 |  | |
| 181 | FAB- CONTROLLER OKK | 1 |  | |
| 182 | 6Z02 Solenoid valve Koganei |  | ||
| 183 | DC20-24F0- S000 Solid state power control Wattlow | 2 |  |  |
| 184 | PS211 OC224 ID218 OD213 ID219 OD412 ID212 II201 CV500-B1112 DRIVE OMRON SYSMAC PLC | 1 1 1 2 3 1 1 1 | | |
| 185 | PS211 CV2000-V1 SLK21 LK210 ID219 OD213 OD412 ID212 IC201 OMRON SYSMAC PLC | 1 1 1 1 4 2 1 1 1 |  | |
| 186 | PS211 OC224 ID218 OD213 ID219 OD412 ID212 II201 CV500-B1112 DRIVE OMRON SYSMAC PLC | 1 1 1 2 3 1 1 1 |  | |
| 187 | PS211 CV2000-V1 SLK21 LK210 ID219 OD213 OD412 ID212 IC201 OMRON SYSMAC PLC | 1 1 1 4 2 1 1 1 1 |  | |
| 189 | PA208 ID219 OD213 IC201 OMRON SYSMAC PLC | 1 4 2 1 |  | |
| 190 | PA208 ID219 OD213 IC201 OMRON SYSMAC PLC | 1 2 2 1 |  | |
| 191 | PA208 ID219 OD213 ID212 OD415 IC201 OMRON SYSMAC PLC | 1 2 2 1 1 1 |  | |
| 192 | PA208 ID219 OD213 II201 OMRON SYSMAC PLC | 1 3 1 1 |  | |
| 193 | PA208 ID219 OD213 ID212 OD415 II201 OMRON SYSMAC PLC | 1 2 2 1 1 1 |  | |
| 194 | PA208 ID219 OD213 IC201 OMRON SYSMAC PLC | 1 2 2 1 |  | |
| 195 | PA208 CT021 ID219 OD213 II201 OMRON SYSMAC PLC | 1 1 3 2 1 |  | |
| 196 | PA208 ID219 OD213 II201 OMRON SYSMAC PLC | 1 2 2 1 |  | |
| 197 | NT-AI001 Link adapter OMRON | 1 |  | |
| 198 | DRT2-AD004 Analog terminal Omron | 1 |  | |
| 199 | 413C-19-9-DN Meter Tsuruga electric | 1 |  | |
| 200 | WME-FB SIGNAL TOWER PATLITE | 1 |  | |
| 201 | NRF210 5A 250VAC 32VDC Fuse IDEC | 4 |  | |
| 202 | PDK-004A- 0WG SCREEN IEE | 2 |  |  |
| 203 | MU1238A-12B AC100V Cooler fan ORIX | 3 |  | |
| 204 | S82F-1524 Switching power supply Omron | 1 |  | |
| 205 | PGU310 Yamatake- honeywell | 1 |  |  |
| 206 | S82F-3024 Switching power supply Omron | 6 |  | |
| 207 | Resistance bulb Hayashi denko | 5 |  |  |
| 208 | RS100-02-B- 1W Stainless regulator Koganei SUS-316 pressure gauge Daiichi keiki | 7 13 |  |  |
| 209 | AIR 3K 25 l/m Flow meter | 3 |  | |
| 210 | AW2000-02-C CDA line regulator with dryer | 4 |  | |
| 211 | 4KB120-D2 Solenoid valve CKD | 2 |  | |
| 212 | 4GA129-E2H Solenoid valve CKD | 1 |  | |
| 213 | LS-30 10 channel PLC Technical&Try | 1 |  | |
| 214 | RS-1000C | 2 |  | |
| 215 | MR-J20A1 100V 200W AC Servo controller Mitsubishi | 1 |  | |
| 216 | KML50-2C-A- 4-0 Valve/switch CKD | 1 |  | |
| 217 | PI200209-B- 001 In-line heater 208V, 6kW PI Tech industrial | 1 |  | |
| 218 | Model: 20620 FV-7279- 631U3-01 ¾” Pneumatic valve Advance | 11 |  | |
| 219 | ¾” Clean flow meter | 7 |  | |
| 220 | PTFE 15 m/m PTFE 20 m/m | 1 10 |  | |
| 221 | AMD412- 20BUS-16-1-4 Pneumatic valve CKD | 1 |  | |
| 222 | AW-3000-03B ½” Regulator with dryer SMC | 1 |  | |
| 223 | NV30-CS Earth leakage circuit breaker Mitsubishi | 4 |  | |
| 224 | NF-SF 2P 15A NF-SF 3P 25A NF-SF 2P 30A NF-SF 2P 45A NF-SF 2P 60A NF-SF 2P 125A No fuse breaker Mitsubishi | 1 1 2 1 6 1 |  | |
| 225 | ABS 53b Circuit breaker MEC | 2 |  | |
| 226 | S-K125UL S-K80UL Contactor Mitsubishi | 1 1 |  | |
| 227 | Wafer guide for FR bath WPCK02 | 1 |  | |
| 228 | Final rinse bath WPCK02 | 1 |  | |
| 229 | QDR BATH WTWS02 | 1 |  | |
| 230 | Chuck clean quartz bath PHRC02 | 2 |  | |
| 230- a | This part of # 82 HITACHI MICROSONIC Model: U0 1000MPA PHRC02 | 2 |  | |
| 230-b | Ultrasonic Transducer US600PMAFT2-S PHRC02 | 2 |  | |
| 231 | Rinse bath | 1 |  | |
| 232 | Quartz wafer guide WPRSO4 | 4 |  | |
| 233 | Quartz QDR bath | 1 |  | |
| 234 | Quartz QDR bath WOES02 | 1 |  | |
| 235 | Quartz bubbler For QDR bath WOES02 | 2 |  | |
| 236 | Wafer guide for FR bath WPDK03 | 1 |  | |
| 237 | Quartz chuck WPDK03 | 4 |  | |
| 238 | Quartz rinse bath with bubbler tube WPDK03 | 1 |  | |
| 239 | SC1-Bath WPRS05 SUGAI/SES | 1 |  | |
| 240 | Quartz chuck For SC1-Bath WPRS05 SUGAI/SES | 4 |  | |
| 241 | Quartz rinse bath with bubbler tube WPDK03 | 1 |  | |
| 242 | Wafer guide for FR bath WPDK03 | 1 |  |  |
| 242 | Quartz final rinse QDR bath WVES01 | 1 | | |
| 243 | Quartz SC1-Bath WOES02 | 1 |  | |
| 244 | Covers For SC1 bath WOES02 | 2 |  | |
| 245 | SC1-2 buffer plate WPRS05 | 2 |  | |
| 246 | SC1-2 bath WPRS05 | 1 |  | |
| 247 | SC1-2 bath WPDK03 | 1 |  | |
| 248 | Wafer guide set left and right WTWS01 200mm Sugai SES | 1 |  | |
| 249 | Wafer guide Quartz WTWS01 200mm Sugai SES | 1 |  | |
| 250 | Quartz bubbler 1 WTWS01 200mm Sugai SES | 1 |  | |
| 251 | HS1 right quartz cover Part of #22 WPMS01 200mm Sugai SES | 1 |  | |
| 252 | Quartz chuck WPMS01 200mm Sugai SES | 2 |  | |
| 253 | Quartz wafer guide WPMS01 200mm Sugai SES | 1 |  | |
| 254 | HS1 bath WPRS05 | 1 |  | |
| 255 | Quartz wafer guide WPCK02 | 4 |  | |
| 256 | Bath cover WPRS01 | 4 |  | |
| 257 | Quartz bubbler WPRS01 | 2 |  | |
| 258 | Quartz TC case WPRS01 | 2 | ||
| 259 | Quartz chuck QDR bath with showers | 2 |  | |
| 260 | Quartz QDR bath WVES01 | 1 |  | |
| 261 | HS1 bath WPRS05 | 1 |  | |
| 262 | Quartz wafer guide WPRS05 200mm Sugai SES | 3 |  | |
| 263 | Quartz QDR bath WPRS05 | 1 |  | |
| 264 | Quartz HQDR bath WPCK02 |  | ||
| 265 | Quartz rinse bath with bubbler tube WPCK02 |  | ||
| 266 | Quartz wafer guide WPRS05 | 4 |  | |
| 267 | Quartz chuck WPRS05 | 2 |  | |
| 268 | SC1-2 buffer plate WPRS05 |  | ||
| 269 | QDR bath WTWS01 | 1 |  | |
| 270 | Quartz QDR bath WOES02 | 1 |  | |
| 271 | Chemical bath covers WOES02 | 2 |  | |
| 272 | Quartz SC1 bath WPDS09 | 1 |  | |
| 273 | Covers for Quartz SC1 bath WPDS09 | 2 |  | |
| 274 | Hardware for Quartz SC1 bath WPDS09 | 1 |  | |
| 275 | Quartz TC case for Quartz SC1 bath WPDS09 | 1 | ||
| 276 | Quartz buffer bath WPRS05 | 1 |  | |
| 277 | Chuck clean quartz bath PHRC02 | 1 |  | |
| 278 | Chuck clean quartz bath PHRC02 | 1 |  | |
| 279 | Quartz QDR bath WTWS01 |  | ||
| 280 | SC1-1bath WPDK03 | 1 |  | |
| 281 | Quartz wafer guide | 1 |  | |
| 282 | Quartz TC case | 2 | ||
| 283 | Quartz HQDR bath with bubbler WPDK03 | 1 |  | |
| 284 | Hand valve PTFE 20mm ¾” KUBOTA George Fischer |  | ||
| 285 | Hand valve PTFE 15mm ½” KUBOTA George Fischer |  | ||
| 286 | AMD312-15BUS-10 03PZ Pneumatic valve CKD |  | ||
| 287 | AMD412-20BUS-16 03Z Pneumatic valve CKD |  |  |
|
| 288 | AMD312-15BUS-10-03Z Pneumatic valve CKD |  |  |
|
| 289 | AMB512-X0234 NC Pneumatic valve CKD |  | ||
| 290 | 5K-P-R-H |  | ||
| 291 | DI flow meter ¾” Tokyo Keiso |  | ||
| 292 | PFA |  | ||
| 300 | PWH96N 24 l/m quartz DI water heater Komatsu | 7 |  | |
| 301 | HI MEGASONIC 600 generator control module set | 1 |  |  |
| 302 | HI MEGASONIC 600 generator control module set | 1 |  |  |
| 303 | Yieldup DHF last and Marangoni dryer 200mm cassette-less type | 1 |  |  |
| 304 | Yieldup Marangoni dryer 200mm cassette-less type | 3 |  |  |
| 305 | Sankio stocker robot & track Kaijo | 5 |  | |
| 306 | stocker cassette handling lifters Kaijo | 4 |  | |
| 307 | RT robot Including PEEK chucks for cassette-less type Kaijo |  |  |
|
| 308 | stocker elevators Kaijo | 6 |  |  |
| 309 | A1S61PN power A2USCPU A1SJ71UC24- R4 A1SX41 A1SY41 A1S66ADA MELSEC Mitsubihi | 1 1 1 2 1 1 | ||
| 310 | Q61P-A2 QD75D4 QD75P4 QY42P QX42 MELSEC Mitsubihi | 1 2 4 2 2 | ||
| 311 | AJ65BT-64AD CC-link Analog Digital Converter Unit Mitsubishi | 11 | ||
| 312 | FP3700-T41 PROFACE | |||
| 313 | H2O2 MEASURING TANK Size: 7 Liter Dimensions: 160W*260D*400H | 2 |  |  |
| 314 | H2O2 MEASURING TANK Size: 8 Liter Dimensions: 130W*440D* 360H | 2 |  |  |
| 315 | H2SO4 MEASURING TANK Size: 35 Liter Dimensions: 250W*640D* 350H | 2 |  | |
| 316 | DHF MEASURING TANK Size: 35 Liter Dimensions: 250W*630D* 350H | 1 |  | |
| 317 | NH4OH MEASURING TANK Size: 2 Liter Dimensions: 120W*180D* 190H | 1 |  |