High Frequency Megasonic HyperClean
and Ultrasonic Cleaning
Challenges solved include:
- Uniform particle removal
- Front end of line (FEOL) and back end of line (BEOL) cleans
- Easy to retrofit to existing wet stations
- Post-CMP/polish cleaning
- Residual glue removal
- Acid-, solvent- and stripper-compatible materials
- MEMS process enhancements
- High Megasonic cleans and removes particles without any damages to the structures
- Solve your critical cleaning issues with our hyper Megasonic
- Custom Process Quartz Tanks, Baths, Megasonic, Utrasonic
- High frequency setup:750kHz or 950kHz
- Replacement services for your existing Megasonic systems
970 kHz Digital Hyper Megasonic
Control Panel
Semiconductor Wafer / LCD
Sub-micron Particle Cleaning
- Digital Display
- CPU Power Control
- High / Low Alarm Control
- Feedback Control System
- Remote & Power on/off
- RS-485 Communication
| Specification | |
|---|---|
| Model | MW-0609AP |
| Output Efficiency | 600Wmax |
| Output Control | 0∿600W |
| Output Circuit | D-Push Pull |
| Electric Power | AC 220V, 1ϕ, 50/60Hz |
| Consumming Current | 6.5 Amax |
| Output Display | 7-Segment / RS-485 Comm. |
| Dimensions | 320mm(W)x460mm(L)x165mm(H) |
| Weight | About 15kg |
Megasonic Transducer
Plate Type
| MODEL | MW-1600TD | MW-1800TD | MW-300TD |
|---|---|---|---|
| Allowance input power | 1200Wmax | 1800Wmax | 2400Wmax |
| Frequency | 970 kHz+25kHz | 970 kHz+25kHz | 970 kHz+25kHz |
| Plate material | SUS316L(or Quartz) | SUS316L(or Quartz) | SUS316L(or Quartz) |
| Using water temp | 70°C Max | 70°C Max | 70°C Max |
| Effective size | 136L X 163W | 165L X 215W | 136L X 163W |
| Wafer | 6"X25 PCS | 8" X25 PCS | 6" X25 PCS |
| Generator Moder | MW-0609AP x 2 | MW-0609AP x 3 | MW-0609APX2 |
Immersible Type
| Kyungil Model | Specification |
|---|---|
UltrasonickNXG-S model | -28kHz/40kHz/68kHz/132kHz/180kHz -LED type level indicator (Analog display) -300W/600W/120W -Alarm out : relay out -300 X 420 X 140(mm) |
UltrasonickNXG-D model | - 28kHz/40kHz/68kHz/132kHz/180kHz -LCD type output display -300W/600W/1200W -PLL auto tunning -Auto power control -Alarm out : relay out -RS-485 communication -310 X 440 x 130(mm) |
Megasonic MW-0609 model | -750kHz / 970 kHz -7 Segment Display -CPU Power Auto Control -Remote & 8 power control -High/low Alarm control -RS-485 communication -Feedback control System -320 x 460 X 165(mm) |
970kHz Megasonic
50W
100W
1.95MHz Megasonic
50W
100W
