{"id":2036,"date":"2022-06-11T04:08:14","date_gmt":"2022-06-11T01:08:14","guid":{"rendered":"http:\/\/localhost\/altay\/?page_id=2036"},"modified":"2022-06-21T15:00:55","modified_gmt":"2022-06-21T12:00:55","slug":"diffusion-furnace","status":"publish","type":"page","link":"https:\/\/altayinc.com\/home\/diffusion-furnace\/","title":{"rendered":"Diffusion Furnace"},"content":{"rendered":"\t\t
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Diffusion Furnaces<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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Athmospheric Process<\/h2> <\/div>\n

\u2022 Wet or dry oxidation
\u2022 Thick oxide (15um)
\u2022 Well drive in
\u2022 H2, N2 annealing
\u2022 POCL3 doping
\u2022 BBr3, B2H6 doping<\/p><\/div> <\/div>\n <\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t

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LP-CVD Process<\/h2> <\/div>\n

\u2022 Poly Si
\u2022 D-Poly Si
\u2022 Nitride: Si3N4
\u2022 Low stress Nitride (250MPa)
\u2022 Super Low stress Nitride (250MPa)
\u2022 Oxide \u2013 LTO, MTO, HTO, TEOS
\u2022 Thick oxide: TEOD (2um up)
\u2022 Sic<\/p><\/div> <\/div>\n <\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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WMVF-4 Series<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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Features<\/h2> <\/div>\n

\u2022 Compact design, very small footprint
\u2022 Automatic boat elevator
\u2022 Supported small size sample wafers
\u2022 R&D type<\/p><\/div> <\/div>\n <\/div>\n\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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MODEL<\/th>WMVF-4 Series<\/th><\/td>\n<\/tr>\n<\/thead>\n
Application processes<\/td>

Atmospheric Processes<\/h4>
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  • Wet, Dry Oxidation<\/li>
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  • N2, H2 Annealing<\/li>
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  • PoCl3 Doping<\/li>
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  • BBr3,B2H6 Doping<\/li>
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LP-CVD Processes<\/h4>
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  • Poly Si<\/li>
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  • Nitride : Si3N4,SiNx(Low stress<100Mpa)<\/li>
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  • Oxide : MTO,HTO,TEOS<\/li>
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  • PSG,Etc.<\/li>
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Temperature Control Range<\/td>200\u00b0C to 1150\u00b0C<\/td><\/td>\n<\/tr>\n
Temperature Control Zone
\n<\/td>		3 Zone<\/td><\/td>\n<\/tr>\n
Temperature Accuracy
\n<\/td>		\u00b11 at 200\u00b0C to 500\u00b0C , \u00b10.5 at 600\u00b0C to 1150\u00b0C<\/td><\/td>\n<\/tr>\n
Uniformity of Film Thickness<\/td>N2, O2, Ar, H2, N2O, SiH4, NH3, B2H6, PH3, SiH2Cl2<\/td><\/td>\n<\/tr>\n
Possible Process Gases
\n<\/td>		PC-Base (Windows XP) PLC Control<\/td><\/td>\n<\/tr>\n
Controller Type
\n<\/td>		PC-Base (Windows XP) PLC Control<\/td><\/td>\n<\/tr>\n
Display
\n<\/td>		15\u201d TFT Touch LCD Monitor<\/td><\/td>\n<\/tr>\n
Wafer Size
\n<\/td>		150mm or less<\/td><\/td>\n<\/tr>\n
Batch Size
\n<\/td>		25 Wafers<\/td><\/td>\n<\/tr>\n
Auto Loader
\n<\/td>		1 Axis Loader (Z Axis)<\/td><\/td>\n<\/tr>\n
Dimension(W*D*H)<\/td>850 * 800 * 2000 (unit : mm)<\/td><\/td>\n<\/tr>\n
Power Supply<\/td>3 Phase 380V, 60A (system will be modified to country-specific power supply)<\/td><\/td>\n<\/tr>\n
Cooling Water
\n<\/td>		Max. 10 LPM \/ Tube<\/td><\/td>\n<\/tr>\n
Compressed Dry Air<\/td>500 ~ 600 KPa<\/td><\/td>\n<\/tr>\n
Heat Exhaust<\/td>150 m3\/h<\/td><\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t
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Diffusion Furnace Parts Available!<\/h2>

Click the button below to view the current Diffusion Furnace Parts list<\/p>View Available Parts<\/a>\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t

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If you want to know more about our product, feel free to contact us.<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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We'll reply your message as soon as possible<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t
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\n\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t\t\t\n\t\t\t\t<\/i>\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\tContact Us<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"

Diffusion Furnaces Athmospheric Process \u2022 Wet or dry oxidation \u2022 Thick oxide (15um) \u2022 Well drive in \u2022 H2, N2 annealing \u2022 POCL3 doping \u2022 BBr3, B2H6 doping LP-CVD Process \u2022 Poly Si \u2022 D-Poly Si \u2022 Nitride: Si3N4 \u2022 Low stress Nitride (250MPa) \u2022 Super Low stress Nitride (250MPa) \u2022 Oxide \u2013 LTO, MTO, […]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-4)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"footnotes":""},"class_list":["post-2036","page","type-page","status-publish","hentry"],"yoast_head":"\nDiffusion Furnace - Altay Inc<\/title>\n<meta name=\"description\" content=\"Discover Altay Inc, Semiconductor Diffusion Furnaces today and contact us for further information about Diffusion Furnaces.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/altayinc.com\/home\/diffusion-furnace\/\" \/>\n<meta property=\"og:locale\" content=\"en_US\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Diffusion Furnace - Altay Inc\" \/>\n<meta property=\"og:description\" content=\"Discover Altay Inc, Semiconductor Diffusion Furnaces today and contact us for further information about Diffusion Furnaces.\" \/>\n<meta property=\"og:url\" content=\"https:\/\/altayinc.com\/home\/diffusion-furnace\/\" \/>\n<meta property=\"og:site_name\" content=\"Altay Inc\" \/>\n<meta property=\"article:modified_time\" content=\"2022-06-21T12:00:55+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/altayinc.com\/home\/wp-content\/uploads\/2022\/06\/Main.jpg\" \/>\n<meta name=\"twitter:card\" content=\"summary_large_image\" \/>\n<meta name=\"twitter:label1\" content=\"Est. reading time\" \/>\n\t<meta name=\"twitter:data1\" content=\"2 minutes\" \/>\n<script type=\"application\/ld+json\" class=\"yoast-schema-graph\">{\"@context\":\"https:\\\/\\\/schema.org\",\"@graph\":[{\"@type\":\"WebPage\",\"@id\":\"https:\\\/\\\/altayinc.com\\\/home\\\/diffusion-furnace\\\/\",\"url\":\"https:\\\/\\\/altayinc.com\\\/home\\\/diffusion-furnace\\\/\",\"name\":\"Diffusion Furnace - 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