{"id":1461,"date":"2022-04-19T03:21:39","date_gmt":"2022-04-19T00:21:39","guid":{"rendered":"http:\/\/localhost\/altay\/?page_id=1461"},"modified":"2022-06-21T15:01:57","modified_gmt":"2022-06-21T12:01:57","slug":"degasification","status":"publish","type":"page","link":"https:\/\/altayinc.com\/home\/degasification\/","title":{"rendered":"Degasification"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-post\" data-elementor-id=\"1461\" class=\"elementor elementor-1461\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-c7748e3 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"c7748e3\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-e6de64c\" data-id=\"e6de64c\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-hjtvrwt elementor-widget elementor-widget-heading\" data-id=\"hjtvrwt\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-default\">Degasification<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-4elzzp1 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"4elzzp1\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-bfsgahx\" data-id=\"bfsgahx\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ufgaomg elementor-widget elementor-widget-heading\" data-id=\"ufgaomg\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">DEGAS SYSTEMS<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6a1d1c5 elementor-widget elementor-widget-heading\" data-id=\"6a1d1c5\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Altay Dox Ultra-High Efficiency DI Water and Chmistry Degas Unit<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-9ed63db elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"9ed63db\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-7d09b9a\" data-id=\"7d09b9a\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-404d1ef elementor-widget elementor-widget-heading\" data-id=\"404d1ef\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Benefits of Degassed DI water with low Dissolved Oxygen (DO)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8a6ef11 elementor-widget elementor-widget-text-editor\" data-id=\"8a6ef11\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u2022 For semiconductor wafer processing applications requiring \u201coxide free\u201d surface preparation:<br \/>* minimizes the initial surface oxide density level and provides a more stable H-terminated surface vs. queue time as the DO is reduced (queue time is the exposure time of the \u201coxide free\u201d wafers to air between the oxide removal process and their placement into an inert environment)<br \/>* prevents surface roughening, faceting and undesired silicon removal<br \/>* prevents surface water marks &amp; particles generated from silica formation<br \/>* provides ultra-pure SiO2 chemical passivation when used for mixing with O3 gas for a DIO3 rinse (1-20 ppm) following an HF last process<br \/>\u2022 Prevents bacterial growth<br \/>\u2022 Prevents corrosion<br \/>Understanding Oxide Thickness, Monolayers (ml) and AOD for Surface Termination Capability Assume the silicon wafer surface is terminated with either SiOx or SiHx species<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8a8d1c1 elementor-widget elementor-widget-heading\" data-id=\"8a8d1c1\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Critical factors to optimize a pristine, \u201coxide free\u201d and H-terminated wafer surface (ex. Si, SiGe, Ge)<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-534abb9 elementor-widget elementor-widget-text-editor\" data-id=\"534abb9\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u2022 Minimize the impurity concentrations to &lt; 1ppb (ppt) in all of the chemicals (ex. DI water, HF, HCl, IPA and N2) and materials<br \/>used for the wet process equipment\u2019s process vessel, plumbing and components.<br \/>\u2022 Minimize the exposure of the process chemistry and wafers to ambient air, namely O2, H2O (moisture) and organics, during and after the oxide removal process.<br \/>\u2022 Minimize permeation of O2, CO2, N2 etc. into the process chemistry using proper materials in the process equipment, inert gas<br \/>purging above the process vessel, and chemical conditioning.<br \/>* While it is impossible to measure absolute \u201coxide free\u201d this term is used to describe below the detection limits of ultra-sensitive and widely accepted surface characterization methods like SIMS and ESCA (XPS)<\/p><p>\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e979296 elementor-widget elementor-widget-heading\" data-id=\"e979296\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-default\">Why is degassing the DI water the most important factor to \u201coxide free\u201d wafer surface preparation?<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-3c7d34c elementor-widget elementor-widget-text-editor\" data-id=\"3c7d34c\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>The optimized process chemistry for the native oxide removal (typically dHF and\/or dHCl) uses &gt; 95% DI water during the<br \/>oxide removal mixture fill, etch and rinse steps <br \/>\u2022 Undegassed DI water typically contains ~2-7 PPM levels of dissolved oxygen and other undesirable gases\/impurities.<br \/>\u2022 The post-oxide etch surface oxygen dose (at\/cm^2) is directly related to the DO.<br \/>\u2022 The effect of optimizing the etching chemistry, process recipe, plumbing materials and permeation prevention are all very<br \/>important, but the DI water (and chemical) degassing have the largest impact on the \u201coxide free\u201d surface integrity.<br \/>\u2022 Membrane contactor technology (using the vacuum + N2 sweep mode) is the most efficient (&gt; 99.999%), safe and costeffective<br \/>means to degas DI water and chemicals.<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-zvhejjl elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"zvhejjl\" data-element_type=\"section\" data-e-type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-b8gnux8\" data-id=\"b8gnux8\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-q63lvqv elementor-section-content-top animated-fast elementor-section-boxed elementor-section-height-default elementor-section-height-default elementor-invisible\" data-id=\"q63lvqv\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;animation&quot;:&quot;fadeIn&quot;,&quot;animation_delay&quot;:200}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-sj5mxrq\" data-id=\"sj5mxrq\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-n7o00xf elementor-widget elementor-widget-heading\" data-id=\"n7o00xf\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-default\">Understanding Oxide Thickness, Monolayers (ml) and AOD for Surface Termination Capability\n<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-k4436b2 elementor-widget elementor-widget-text-editor\" data-id=\"k4436b2\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>Assume the silicon wafer surface is terminated with either SiOx or SiHx species<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-tfj74mw\" data-id=\"tfj74mw\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-mn234va elementor-widget elementor-widget-image\" data-id=\"mn234va\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1074\" height=\"606\" src=\"https:\/\/altayinc.com\/home\/wp-content\/uploads\/2022\/04\/image5.jpg\" class=\"attachment-full size-full wp-image-1480\" alt=\"\" srcset=\"https:\/\/altayinc.com\/home\/wp-content\/uploads\/2022\/04\/image5.jpg 1074w, https:\/\/altayinc.com\/home\/wp-content\/uploads\/2022\/04\/image5-300x169.jpg 300w, https:\/\/altayinc.com\/home\/wp-content\/uploads\/2022\/04\/image5-1024x578.jpg 1024w, https:\/\/altayinc.com\/home\/wp-content\/uploads\/2022\/04\/image5-768x433.jpg 768w\" sizes=\"(max-width: 1074px) 100vw, 1074px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-9nevrdj elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"9nevrdj\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-1cb156d elementor-section-height-min-height elementor-section-boxed elementor-section-height-default elementor-section-items-middle\" data-id=\"1cb156d\" data-element_type=\"section\" data-e-type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t\t<div class=\"elementor-background-overlay\"><\/div>\n\t\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-255f41fd\" data-id=\"255f41fd\" data-element_type=\"column\" data-e-type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-4d8f967a elementor-widget elementor-widget-heading\" data-id=\"4d8f967a\" data-element_type=\"widget\" data-e-type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div 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class=\"elementor-button-wrapper\">\n\t\t\t\t\t<a class=\"elementor-button elementor-button-link elementor-size-md\" href=\"https:\/\/altayinc.com\/home\/contact\/\">\n\t\t\t\t\t\t<span class=\"elementor-button-content-wrapper\">\n\t\t\t\t\t\t<span class=\"elementor-button-icon\">\n\t\t\t\t<i aria-hidden=\"true\" class=\"fas fa-chevron-circle-right\"><\/i>\t\t\t<\/span>\n\t\t\t\t\t\t\t\t\t<span class=\"elementor-button-text\">Contact Us<\/span>\n\t\t\t\t\t<\/span>\n\t\t\t\t\t<\/a>\n\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>Degasification DEGAS SYSTEMS Altay Dox Ultra-High Efficiency DI Water and Chmistry Degas Unit Benefits of Degassed DI water with low Dissolved Oxygen (DO) \u2022 For semiconductor wafer processing applications requiring \u201coxide free\u201d surface preparation: * minimizes the initial surface oxide density level and provides a more stable H-terminated surface vs. queue time as the DO [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"site-sidebar-layout":"no-sidebar","site-content-layout":"page-builder","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"disabled","ast-breadcrumbs-content":"","ast-featured-img":"disabled","footer-sml-layout":"","ast-disable-related-posts":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"default","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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